凯发

In this talk, several of our works for the synthesis and device technology on graphene will be presented. Epitaxial graphene on SiC is available for instance as 1) full coverage, 2) isolated flakes and 3) selectively grown material, as well as combined with device fabrication methods such as ion implantation for gating or local anodic oxidation by atomic force microscope for device resistance tuning. Plasma enhanced (PE) chemical vapor deposition (CVD) of porous vertically oriented graphene sheets has been applied to supercapacitor devices and Li-ion batteries. Alternative methods such as graphitization of ultrathin diamond-like carbon membranes patterned by focused ion beam induced deposition can be also introduced. Additional works such as wafer scale integration of transistors based on CVD graphene for biomedical applications or single wall carbon nanotubes for sensing will be shown as examples of the capability of the CNM-CSIC for fabrication of micro/nanoelectronic devices and systems.